Video microimaging system

Details Video microimaging system Video microimaging system

1989-04-17

1989-10-03

Tarcza, Thomas H.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356153, G01N 2132, G01B 1126

Patent

active

H00006874

ABSTRACT:
An apparatus for observing defects in and evolution of induced damage on a est surface is created by combining an illumination system with a magnification system. A visible light source is used to illuminate the surface of an optical sample. A test laser system is aligned to illuminate the identical surface areas of the optical sample with light of preselected wavelength (frequency) and intensity. A telescope is focused on the illuminated surface area. The output image of the telescope is fed to a video camera system which in turn is connected to a video tape system.

REFERENCES:
patent: 3752587 (1973-08-01), Meyers et al.
patent: 3769963 (1973-11-01), Goldman et al.
patent: 3909131 (1989-09-01), Waters
patent: 4319839 (1982-03-01), Durran
patent: 4330208 (1982-05-01), Eloy
patent: 4389669 (1983-06-01), Epstein et al.

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