Vibratory transducer

Details Vibratory transducer Vibratory transducer

1988-01-19

1989-06-27

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

310324, G01L 1100

Patent

active

048417750

ABSTRACT:
A vibratory transducer comprising a vibratory beam composed of an n-type layer and having at least one end fixed. The vibratory beam is formed by selectively etching an n-type layer formed by adding impurities locally to a single silicon crystal. The vibratory transducer also comprises means for vibrating the vibratory beam and means for detecting vibration of the vibratory beam. The vibratory transducer measures pressure, temperature, density, etc, by detecting change in the resonant frequency of the vibratory beam. The vibratory beam can be finely etched irrespective of the density of the impurities therein by forming the vibratory beam in an alkaline aqueous solution while applying a negative DC or pulsed voltage to a p-type layer and a positive DC or pulsed voltage to an n-type layer. The vibrating and detecting means for the vibratory beam can be easily provided by making a diode and a transistor including the vibratory beam in the transducer.

REFERENCES:
patent: 4229979 (1980-10-01), Greenwood

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