Vibratory rotation sensor with scanning-tunneling-transducer rea

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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7350413, 73 137, G01P 904

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057124272

ABSTRACT:
A vibratory rotation sensor that utilizes non-capacitive mechanical displacement detectors (24) to detect the flexural standing wave pattern in a hemispherical resonator (14). In a preferred embodiment, a plurality of tunneling transducers (24) are positioned around the hemispherical resonator (14) to detect the standing wave. A "force-to-rebalance" mechanization mode is preferably used for calculating the sensor's rate of rotation, with a transducer (24) placement that allows for constant calibration of the sensor's scale factor. In addition, a pickoff transducer orientation is provided that allows for simultaneous calculation of the sensor's rotation angle and any linear acceleration that is exerted on the sensor's hemispherical resonator (14), thereby allowing the sensor to be simultaneously used as a rotation sensor and an accelerometer.

REFERENCES:
patent: 4951508 (1990-08-01), Loper, Jr. et al.
patent: 5218867 (1993-06-01), Varnham et al.
patent: 5285686 (1994-02-01), Peters
T.W. Kenny et al., "Micromachined Tunneling Accelerometer", NASA Tech. Brief, vol. 17, No. 11, Item #61, Nov. 1993, pp. i, 1-4, 1a-3a.
T.W. Kenny et al., "Techniques for Mass Production of Tunneling Electrodes", NASA Tech. Brief, vol. 17, No. 11, Item #1, Nov. 1993, pp. i -i i, 1-3.
S.E. McBride et al., "Scanning-Tunneling-Microscope Detection of Surface Acoustic Waves", Proceedings of the 1992 IEEE Ultrasonics Symposium, (1992), pp.445-448.

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