Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2006-02-23
2010-02-02
Kwok, Helen C. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504150
Reexamination Certificate
active
07654139
ABSTRACT:
To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor1according to the present invention includes a supporting substrate2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands4disposed thereon; and a vibration element20mounted on a surface2-1of the supporting substrate. The vibration element20includes a base portion22having a mounting surface22-2provided with a plurality of terminals25that are connected to the lands; and a vibrator portion23extending integrally from a side of the base portion22in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion22, the substrate-facing surface being provided with a first electrode layer27, a piezoelectric layer28stacked on the first electrode layer, and a second electrode layer29, 30stacked on the piezoelectric layer. The vibration element20is mounted on the supporting substrate2by joining the terminals25to the lands4with metallic projections26disposed therebetween.
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International Search Report dated Mar. 20, 2006.
Aizawa Manabu
Honda Junichi
Inaguma Teruo
Sasaki Shin
Suzuki Koji
Kwok Helen C.
Sonnenschein Nath & Rosenthal LLP
Sony Corporation
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