Vibratory beam electromechanical resonator

Details Vibratory beam electromechanical resonator Vibratory beam electromechanical resonator

2005-03-29

2005-03-29

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S363000

Reexamination Certificate

active

06873088

ABSTRACT:
A resonator formed by the steps of defining an active single-crystal silicon layer delimited by a buried insulator layer, depositing a silicon-germanium layer by a selective epitaxy method so that the silicon-germanium layer grows above the active single-crystal silicon area, depositing by a non-selective epitaxy method a silicon layer and etching it according to a desired contour, and removing the silicon-germanium by a selective etching with respect to the silicon and to the insulator.

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French Search Report from French Patent Application No. 01/04510, filed Apr. 3, 2001.

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