Vibrator, vibratory gyroscope, and linear accelerometer

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Patent

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Details

310311, 310370, 7350403, 7351434, H01L 4108

Patent

active

06046531&

ABSTRACT:
A vibrator comprising a base part at least one of whose ends is fixed, a first leg extending in a direction crossing this base part, a second leg extending in a direction crossing the base part and being opposed to said first leg with respect to said base part, a first bending-vibration piece extending in a direction crossing said first leg, a second bending-vibration piece extending in a direction crossing the first leg and being opposite to said first bending-vibration piece with respect to said first leg, a third bending-vibration piece extending in a direction crossing said second leg, and a fourth bending-vibration piece extending in a direction crossing the second leg and being opposite to said third bending-vibration piece with respect to said second leg.

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patent: 5821420 (1998-10-01), Cho et al.
patent: 5861705 (1999-01-01), Wakatsuki et al.

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