Vibrator and manufacturing method thereof

Details Vibrator and manufacturing method thereof Vibrator and manufacturing method thereof

2005-02-01

2005-02-01

Cherry, Euncha P. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S224200

Reexamination Certificate

active

06850349

ABSTRACT:
A vibrator comprises a vibrating member and a fixing member. The vibrating member has a pair of support members, a movable plate capable of vibrating with respect to the support members, and a pair of elastic members connecting the support members to the movable plate. The fixing member holds the support members of the vibrating member. A material mainly constituting the fixing member has a larger coefficient of thermal expansion than that of a material mainly constituting the elastic members of the vibrating member.

REFERENCES:
patent: 3532408 (1970-10-01), Dostal
patent: 5557444 (1996-09-01), Melville et al.
patent: 6046866 (2000-04-01), Ikegame
patent: 6061323 (2000-05-01), Jerman et al.
patent: 6122089 (2000-09-01), Minamoto et al.
patent: 0 712 121 (1996-05-01), None
patent: 9-197334 (1997-07-01), None

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