Vibration-type piezoelectric acceleration sensor element and...

Details Vibration-type piezoelectric acceleration sensor element and... Vibration-type piezoelectric acceleration sensor element and...

2007-01-30

2007-01-30

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514290, C310S321000, C310S348000

Reexamination Certificate

active

11182098

ABSTRACT:
The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode layer formed on the piezoelectric thin-film layer. A first end of the diaphragm is connected to the frame. The support retains a second end of the diaphragm. The retentive part retains the support so that the support is reciprocable only in a direction through the first end and the second end of the diaphragm.

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