Vibration-type angular rate sensor

Details Vibration-type angular rate sensor Vibration-type angular rate sensor

2005-05-03

2009-10-20

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S493000

Reexamination Certificate

active

07603903

ABSTRACT:
An angular rate sensor includes a sensor chip having an oscillator vibrating at a predetermined frequency and detecting an angular velocity applied to this oscillator around a predetermined rotation axis. A circuit chip, laminated with the sensor chip, has a circuit formed on a surface thereof to detect the angular velocity based on a signal obtained from the sensor chip. The sensor chip and the circuit chip are bonded with an adhesive film. A resonance frequency of the sensor chip is smaller than (½)1/2times a driving frequency of the oscillator in a condition that adjustment is applied to at least one of configuration or elastic coefficient of the adhesive film.

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patent: 7263885 (2007-09-01), Goto
patent: 2004/0020291 (2004-02-01), Katsumata et al.
patent: 2000-55667 (2000-02-01), None
patent: A-2000-249562 (2000-09-01), None
patent: 2003-21647 (2003-01-01), None

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