Measuring and testing – Vibration – Sensing apparatus
Reexamination Certificate
2006-04-20
2009-10-13
Williams, Hezron (Department: 2856)
Measuring and testing
Vibration
Sensing apparatus
Reexamination Certificate
active
07600429
ABSTRACT:
According to embodiments of the present invention, vibration sensor array includes at least two microelectromechanical systems (MEMS) vibration sensors formed on a substrate. The vibration element of the first vibration sensor is a different type than the vibration element of the second vibration sensor. For example, the at least two different vibration elements may be selected from a cantilever beam, a bridge beam, a membrane, and/or an annular diaphragm.
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Blakely , Sokoloff, Taylor & Zafman LLP
Fayyaz Nashmiya S
Intel Corporation
Williams Hezron
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