Optics: measuring and testing – By light interference – Having partially reflecting plates in series
Reexamination Certificate
2007-02-20
2007-02-20
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Having partially reflecting plates in series
C356S506000
Reexamination Certificate
active
10952091
ABSTRACT:
A sensor and method for using the same is disclosed. The sensor includes an optical cavity defined by first and second mirrors that have a spacing therebetween that varies in response to a force applied to the sensor and to a control voltage. The sensor has a drive circuit that measures light leaving an output port that samples light in said cavity and applies the control voltage to the optical cavity such that the spacing between the mirrors remains at a predetermined value independent of the force, the control voltage determining an output signal that provides a measurement of the force applied to the optical cavity. In one embodiment, the first mirror is fixed to the second mirror by a spring mechanism that causes the first mirror to move away from the second mirror, and the control voltage causes the first mirror to move toward the second mirror.
REFERENCES:
patent: 6509972 (2003-01-01), Korn
patent: 6538748 (2003-03-01), Tucker et al.
patent: 2005/0179912 (2005-08-01), Van Brocklin et al.
Corredoura Paul
Huber Dan
Agilent Technologie,s Inc.
Connolly Patrick
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