Vibration sensor employing a flexible diaphragm and an electret

Details Vibration sensor employing a flexible diaphragm and an electret Vibration sensor employing a flexible diaphragm and an electret

1997-01-23

1998-08-25

Williams, Hezron E.

Measuring and testing

Vibration

Sensing apparatus

7351432, 7351434, G01H 1108, G01P 1512, G01P 15125

Patent

active

057984603

ABSTRACT:
A vibration sensor includes a substrate (5), a plate-like diaphragm (3) forming a capacitor, and holding means (2), (4), (6) for holding the diaphragm so as to be movable in parallel to the substrate. The diaphragm includes a plurality of flexible displacement portions (3c), (3d) for enabling the supporting portion of the diaphragm to be movable in parallel to the substrate. When vibrations are applied to the vibration sensor, the diaphragm portion of the diaphragm is vibrated and electrostatic capacity formed between the substrate and the diaphragm is changed based on the vibrations. Vibrations are detected on the basis of the change of electrostatic capacity. Since the vibration sensor includes the flexible displacement portions, the diaphragm becomes difficult to be vibrated due to a sound pressure and a vibration detected output can be prevented from being disturbed by the sound pressure.

REFERENCES:
patent: 3736552 (1973-05-01), Sessler et al.
patent: 4192977 (1980-03-01), Stamm
patent: 4516428 (1985-05-01), Konomi
patent: 4930042 (1990-05-01), Wiegand et al.
patent: 5005414 (1991-04-01), Holland et al.
patent: 5115291 (1992-05-01), Stokes
patent: 5226325 (1993-07-01), Komurasaki et al.

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