Vibration sensor

Details Vibration sensor Vibration sensor

2004-08-31

2008-10-07

Williams, Hezron E. (Department: 2856)

Measuring and testing

Vibration

Sensing apparatus

C073S514010, C073S514320

Reexamination Certificate

active

07430915

ABSTRACT:
A vibration sensor capable of preventing a diaphragm electrode from being damaged without lowering sensitivity as well as realizing a satisfactory assembling process. The vibration sensor includes a fixed electrode1, and a diaphragm electrode3having a weight member2attached to a membrane surface facing away from the fixed electrode1and fixedly supported at peripheries thereof, the vibration sensor being capable of outputting variation of capacitance between the fixed electrode and the diaphragm electrode as vibration signals. The vibration sensor further includes projecting portions2aformed on parts of an end portion of the weight member2to project along the direction of the membrane surface and spaced from the membrane surface of the diaphragm electrode3, and a restricting member4for contacting the projecting portions2aof the weight member2displaced along the direction of the membrane surface of the diaphragm electrode3, thereby to restrict displacement of the weight member2.

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