Vibration resistant interferometry

Details Vibration resistant interferometry Vibration resistant interferometry

2008-01-22

2008-01-22

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S495000

Reexamination Certificate

active

11112332

ABSTRACT:
Scanning interferometry data for a test object is provided, the data typically including intensity values for each of multiple scan positions for each of different spatial locations of the test object. The intensity values for each spatial location define an interference signal for the spatial location, and the intensity values for a common scan position define a data set for that scan position. Scan values are provided for each scan position, in which scan value increments between various scan values can be non-uniform. Information is determined about the test object based on the scanning interferometry data and scan values. The determination includes transforming at least some of the interference signals into a frequency domain with respect to the scan values.

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