Vibration-resistant interferometer apparatus

Details Vibration-resistant interferometer apparatus Vibration-resistant interferometer apparatus

2006-12-07

2008-12-16

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07466427

ABSTRACT:
A half mirror4divides a luminous flux emitted from a low-coherence light source1into two luminous fluxes, a secondary reference plate6is held integrally with a reference plate16, and a secondary sample8is held integrally with a sample17. A first luminous flux which is obtained through dividing by the half mirror4is reflected at a mirror5and which reaches a secondary reference surface6a, is reflected at the secondary reference surface6a, returns along the same optical path, and is transmitted through the half mirror4. The second luminous flux reaches a secondary sample surface8a, is reflected at the secondary sample surface8a, returns along the same optical path, and is combined with the first luminous flux at the half mirror4. The optical path length difference between the first luminous flux and the second luminous flux coincides with approximately twice the optical distance between a reference surface16aand a sample surface17a.

REFERENCES:
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patent: HEI08-114412 (1996-05-01), None
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patent: HEI09-21606 (1997-01-01), None
Hotate, Kazuo et al., “Photonic Sensing by Synthesis of Coherence Function”,Proceedings of 15th Meeting on Lightwave Sensing Technology, May 1995, pp. 75-82.

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