Vibration mirror, optical scanning device, and image forming...

Details Vibration mirror, optical scanning device, and image forming... Vibration mirror, optical scanning device, and image forming...

2007-05-22

2007-05-22

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S900000, C216S024000, C216S041000

Reexamination Certificate

active

10953388

ABSTRACT:
A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.

REFERENCES:
patent: 6542282 (2003-04-01), Smith et al.
patent: 6827866 (2004-12-01), Novotny
patent: 03-011144 (1991-01-01), None
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patent: 2001-513223 (2001-08-01), None
U.S. Appl. No. 11/216,180 filed Sep. 1, 2005, Fujii et al.

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