Vibration isolator and exposure apparatus

Details Vibration isolator and exposure apparatus Vibration isolator and exposure apparatus

1997-07-31

2000-03-14

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Step and repeat

356400, 248550, 248638, G03B 2742, F16M 1300

Patent

active

060380136

ABSTRACT:
An apparatus that performs an efficient actuator control operation without generation of excess heat by the actuators is described. The control mode of the exposure apparatus main body part is set in accordance with the apparatus operating mode by a target value output part, and actuators are controlled by a control device on the basis of the outputs of displacement sensors and vibration sensors in accordance with the set control mode, thus effecting vibration control and position control of the exposure apparatus main body. Accordingly, an efficient actuator control operation corresponding to the operating mode of the moving body is possible, and unnecessary driving of the actuators can be avoided.

REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4650983 (1987-03-01), Suwa
patent: 4780617 (1988-10-01), Umatate et al.
patent: 5172160 (1992-12-01), Eijk et al.
patent: 5187519 (1993-02-01), Takabayashi et al.
patent: 5446519 (1995-08-01), Makinouchi
patent: 5610686 (1997-03-01), Osanai
patent: 5767948 (1998-06-01), Loopstra et al.
patent: 5812420 (1998-09-01), Takahashi

Affiliated with

Also associated with

Rating

Vibration isolator and exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vibration isolator and exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vibration isolator and exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-174781