Vibration-insensitive interferometer

Optics: measuring and testing – By light interference – Having polarization

Reexamination Certificate

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C356S513000

Reexamination Certificate

active

11207327

ABSTRACT:
The present invention relates to vibration-insensitive point-diffraction interferometry. For the purpose of obtaining high immunity to vibration, a single-mode optical fiber is used to generate the reference wave, by means of point diffraction, directly from a measurement wave reflected from test objects. The capability of vibration desensitization is further strengthened by adding a spatial phase-shift device that enables four interferograms of different amounts of phase shift to be obtained simultaneously with no time delay between interferograms. The present invention may be effectively used in the design of measuring systems for in-line applications where measurements need to be performed in the presence of significant levels of vibration.

REFERENCES:
patent: 6704112 (2004-03-01), Sommargren et al.
patent: 6879402 (2005-04-01), Kuchel
Osuk Y. Kwon, et al., “Stroboscopic Phase-Shifting Interferometry”,Optical Letters, vol. 12, No. 11, Nov. 1987, pp. 855-857.
R. Smythe, et al., “Instantaneous Phase Measuring Interferometry”,Optical Engineering, vol. 23, No. 4, Jul./Aug. 1984, pp. 361-364.
Toshihiko Yoshino, et al., “Closed-Loop Phase-Shifting Interferometry with a Laser Diode”,Optical Letters, vol. 23, No. 20, Oct. 15, 1998, pp. 1576-1578.

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