Vibration detector and method for rotating shaft

Measuring and testing – Vibration – Sensing apparatus

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G01H 110

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active

051448408

ABSTRACT:
Apparatus for detecting abnormal vibration in a shaft, such as a rotating crucible holder drive shaft of a crystal puller, has a pair of sensors disposed 90 degrees with respect to each other. The signals are high pass filtered and added together, then low pass filtered and full wave rectified to operate an alarm and strip recorder. A method for detecting vibration in a shaft comprises sensing vibrations in the shaft, filtering the sensed signals, and rectifying the filtered signals.

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