Vibration damping apparatus and method

Details Vibration damping apparatus and method Vibration damping apparatus and method

1997-03-10

2000-12-05

Graham, Matthew C.

Spring devices

Resilient shock or vibration absorber

188378, H01L 2130

Patent

active

061555428

ABSTRACT:
A vibration damping apparatus includes a plurality of actuators for removing vibration of a table as an object of vibration damping, a detection device for detecting a vibration status of the table, an acquisition device for acquiring compensation amounts for a plurality of directional elements, from the vibration status detected by the detection device, and an allocation device for allocating an actuator-driving force corresponding to a compensation amount for a predetermined directional element, among the compensation amounts acquired by the acquisition device, to an actuator having a small amount of driving force, allocated based on a compensation amount for another directional element.

REFERENCES:
patent: 5653317 (1997-08-01), Wakui
patent: 5660255 (1997-08-01), Schubert et al.

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