Machine element or mechanism – Mechanical movements – Reciprocating or oscillating to or from alternating rotary
Reexamination Certificate
2005-11-29
2005-11-29
Fenstermacher, David M. (Department: 3682)
Machine element or mechanism
Mechanical movements
Reciprocating or oscillating to or from alternating rotary
C074S089420, C414S331140, C414S940000
Reexamination Certificate
active
06968753
ABSTRACT:
A vibration-dampening base for a ball-type lead screw of a load port transfer system is disclosed. A load port transfer system includes a vertical arm drive motor assembly, a ball-type lead screw, and a vibration-dampening base connecting the vertical arm drive motor assembly to the ball-type lead screw. The vibration-dampening case can include a cross member into which the ball-type lead screw is disposed, one or more pillar members supporting the cross member, and one or more support stands. Each support stand supports a corresponding one of the one or more pillar members.
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Cheng Ping-Jen
Chou Tzu-Chieh
Tzeng Huan-Liang
Fenstermacher David M.
Taiwan Semiconductor Manufacturing Co.
Tung & Associates
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