Vibration control of an object

Details Vibration control of an object Vibration control of an object

2005-04-19

2005-04-19

Wells, Nikita (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492100, C250S492200, C250S492220, C267S136000, C073S663000, C073S662000, C073S664000

Reexamination Certificate

active

06881963

ABSTRACT:
An apparatus for controlling motion of an object includes a first actuator for moving the object, an elastic-motion measuring unit for measuring elastic motion of the object, and a control unit for controlling the first actuator based on a result of measurement of the elastic-motion measuring unit. Another apparatus for controlling motion of an object includes a first actuator for moving the object, a second actuator for suppressing elastic motion of the object, and a control unit for controlling the second actuator based on a result of predicting the elastic motion of the object caused by the first actuator.

REFERENCES:
patent: 5734236 (1998-03-01), Motegi
patent: 6378672 (2002-04-01), Wakui
patent: 6742393 (2004-06-01), Ito
patent: 5-225734 (1993-09-01), None
patent: 7-83276 (1995-03-01), None
patent: 11-194066 (1999-07-01), None

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