Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
1999-12-10
2001-09-25
Oen, William (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
Reexamination Certificate
active
06293154
ABSTRACT:
FIELD OF INVENTION
The present invention relates to pressure sensing devices and more particularly to a pressure sensing device adapted for use in environments which subject the device to harsh vibrations or accelerations.
BACKGROUND OF INVENTION
Semiconductor pressure transducers are frequently used in applications which require operation in environments that subject the transducers to substantial vibrations and/or accelerations. A typical transducer includes a piezoresistive sensor device formed on a diaphragm which deflects in response to an applied pressure. Errors can be caused by undesired vibrations and/or accelerations. These errors are due to undesirable deflection of the sensor diaphragm in response to these undesired vibrations and accelerations. A typical application is the measuring of pressures inside of a jet-engine, where a sensor is exposed to substantial vibrations, accelerations and decelerations. It is desirable to compensate the stress sensing network of piezoresistors used in such applications to eliminate vibration and/or acceleration induced errors.
Accordingly, it is an object of the invention to provide a pressure sensing device adapted to accurately measure pressure in an environment which subjects the device to substantial vibrations and accelerations.
SUMMARY OF INVENTION
A pressure sensing device for producing an output proportional to an applied pressure irrespective of vibration and acceleration of the device, the device including: a first deflecting diaphragm formed in a first wafer and including a first plurality of piezoresistors mounted thereon or otherwise formed therein, the first diaphragm being responsive to the applied pressure and also vibration of the device; and, a second deflecting diaphragm formed in the first wafer and including a second plurality of piezoresistors mounted thereon or otherwise formed therein, the second diaphragm being responsive only to the vibration of the device; wherein, the first and second pluralities of piezoresistors are electrically coupled together to provide a common output such that they cooperatively at least partially cancel a portion of the common output associated with the vibration of the device.
REFERENCES:
patent: 3930823 (1976-01-01), Kurtz et al.
patent: 4222277 (1980-09-01), Kurtz et al.
patent: 5955771 (1999-09-01), Kurtz et al.
Duane Morris & Heckscher
Kulite Semiconductor Products
Oen William
Plevy Arthur L.
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