Vibrating type transducer

Details Vibrating type transducer Vibrating type transducer

1989-10-18

1991-04-23

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

310338, G01L 1100

Patent

active

050091085

ABSTRACT:
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.

REFERENCES:
patent: 4841775 (1989-06-01), Ikeda et al.
patent: 4938068 (1990-07-01), Clements

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