Vibrating type pressure measuring device

Details Vibrating type pressure measuring device Vibrating type pressure measuring device

1991-05-02

1992-06-23

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73778, 7386259, 310338, G01L 708, G01L 1100

Patent

active

051232820

ABSTRACT:
A vibrating type pressure measuring device having good shock wave proof measuring characteristics, high frequency response, good temperature characteristics, and can be readily miniaturized, wherein pressure to be measured is applied to a silicon diaphragm provided in an internal vacant space of a housing, and a magnetic field is applied by a DC current magnetic field applying device to a vibrator beam arranged in the inside of the diaphragm, with a gap therebetween kept in vacuum, and fixed to the diaphragm at both ends, and detects the changes in natural frequency of the vibrator beam caused by the pressure to be measured. The diaphragm and/or vibrator beam are constructed so one or the other or both have rough or uneven surfaces so as to prevent any adhesion therebetween.

REFERENCES:
patent: 4813271 (1989-03-01), Greenwood
patent: 5009108 (1991-04-01), Harada et al.
patent: 5060526 (1991-10-01), Barth et al.

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