Vibrating quartz diaphragm pressure sensor

Details Vibrating quartz diaphragm pressure sensor Vibrating quartz diaphragm pressure sensor

1983-06-10

1984-10-23

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310346, 7386147, 73703, H01L 4108

Patent

active

044790708

ABSTRACT:
A quartz crystal vibrating diaphragm pressure sensor includes a primary quartz crystal body having a diaphragm formed therein and electrodes on each side of the diaphragm for piezoelectrically exciting thickness shear mode oscillations of said diaphragm, said oscillations varying in frequency in accordance with variations in fluid pressures applied to the surfaces of said diaphragm. A second identical or substantially identical diaphragm similarly excited but exposed to a constant pressure provides a reference frequency for providing precision difference frequency pressure measurement and for inherently compensating for ambient conditions affecting both diaphragms.

REFERENCES:
patent: 3561832 (1971-02-01), Karrer et al.
patent: 3617780 (1971-11-01), Benjaminson
patent: 3978731 (1976-09-01), Reeder et al.
patent: 4166967 (1979-09-01), Benes et al.
patent: 4216401 (1980-08-01), Wagner
patent: 4317372 (1982-03-01), Hartemann
patent: 4361050 (1982-11-01), Coussot et al.

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