Vibrating pumping stage for molecular vacuum pumps, and...

Details Vibrating pumping stage for molecular vacuum pumps, and... Vibrating pumping stage for molecular vacuum pumps, and...

2006-08-01

2006-08-01

Freay, Charles G. (Department: 3746)

Pumps

Motor driven

Electric or magnetic motor

Reexamination Certificate

active

07083398

ABSTRACT:
A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) with a vibrating membrane and a device controlling the membrane in order to provide its oscillation with respect to the substrate. A molecular vacuum pump incorporates this vibrating pumping stage.

REFERENCES:
patent: 862867 (1907-08-01), Eggleston
patent: 5836750 (1998-11-01), Cabuz
patent: 6116863 (2000-09-01), Ahn et al.
patent: 6146543 (2000-11-01), Tai et al.
patent: 6168395 (2001-01-01), Quenzer et al.
patent: 6247908 (2001-06-01), Shinohara et al.
patent: 6351054 (2002-02-01), Cabuz et al.
patent: 1 125 065 (2002-07-01), None

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