Vibrating probe for a scanning probe microscope

Details Vibrating probe for a scanning probe microscope Vibrating probe for a scanning probe microscope

1997-02-21

2000-06-13

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Illumination systems or details

250234, G03B 2772, H01J 314

Patent

active

060755857

ABSTRACT:
A probe for a scanning probe microscope includes a cantilever having a length defined between a free end and a base end. The base end is connected to a support. The free end includes a sharp tip, and is free to oscillate at a selected frequency. The probe also includes a knife-edge structure that is positioned adjacent to the cantilever and perpendicular to the length of the cantilever. The knife edge inhibits the cantilever from vibrating at a first-order resonant frequency of the cantilever, and instead encourages the cantilever to vibrate at third or higher order resonant frequencies.

REFERENCES:
patent: 4479831 (1984-10-01), Sandow et al.
patent: 4724318 (1988-02-01), Binnig
patent: 5138174 (1992-08-01), Tang
patent: 5209117 (1993-05-01), Bennett
patent: 5210410 (1993-05-01), Barrett
patent: 5221415 (1993-06-01), Albrecht et al.
patent: 5227626 (1993-07-01), Okada et al.
patent: 5231286 (1993-07-01), Kajimura et al.
patent: 5254854 (1993-10-01), Betzig
patent: 5345815 (1994-09-01), Albrecht et al.
patent: 5354985 (1994-10-01), Quate
patent: 5406832 (1995-04-01), Gamble et al.
patent: 5444244 (1995-08-01), Kirk et al.
patent: 5537863 (1996-07-01), Fujiu et al.
patent: 5618760 (1997-04-01), Soh et al.
patent: 5804709 (1998-09-01), Bourgoin et al.
P.K. Tien, entitled "Integrated optics and new wave phenomena in optical waveguides", Reviews of Modern Physics, vol. 49, No. 2, Apr. 1977, pp. 361-362.
Chen S. Tsai, entitled "Integrated Acoustooptic Circuits and Applications", IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 39, No. 5, Sep. 1992, pp. 529-554.
Chen S. Tsai, entitled "Guided-Wave Acousto-Optics Interactions, Devices and Applications", (Ed.), Springer-Verlag, 1990, pp. 79 and 250-256.
M. Rudman et al., entitled "Near-field subwavelength micropattern generation: Pipette guided argon fluoride excimer laser microfabrication", J. Appl. Phys. 72(9), Nov. 1, 1992, pp. 4379-4383.
U. Sh. Fischer, entitled "Optical characteristics of 0.1mm circular apertures in a metal film as light sources for scanning ultramicroscopy", J. Vac. Sci. Technol. B 3(1), Jan/Feb. 1985, pp. 386-390.
N.F. van Hulst et al., entitled "Near-field optical microscope using a silicon-nitride probe", Appl. Phys. Lett. 62(5), Feb. 1, 1993, pp. 461-463.
U.Ch. Fischer, entitled "Near-field optical scanning microscopy in reflection", Appl. Phys. Lett. 52(4), Jan. 25, 1988,pp. 249-251.
T. Nagata et al., entitled "Micron-Size Optical Waveguide for Optoelectronic Integrated Circuits", Extended Abstracts of the 1993 International Conference on Solid State Devices and Materials, Makuhari, 1993, pp. 1047-1049.
K. Lieberman et al., entitled "A Light Source Smaller Than the Optical Wavelength", Science, vol. 247, Jan. 5, 1990, pp. 59-61.
R. Toledo-Crow et al., entitled "Near-field differential scanning optical microscope with atomic force regulation", Appl. Phys. Lett. 60(24), Jun. 15, 1992, pp. 2957-2959.
Eric Betzig et al., entitled "Near-Field Optics: Microscopy, Spectroscopy, and Surface Modification Beyond the Diffraction Limit", Science vol. 257, Jul. 10, 1992, pp. 189-195.
E. Betzig et al., entitled "Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric Scale", Science vol. 251, Mar. 22, 1991, pp. 1468-1470.
E. Betzig et al., entitled "Combined shear force and near-field scanning optical microscopy", Appl. Phys. Lett. 60(20), May 18, 1992, pp. 2484-2486.
N. Barniol et al., entitled "Modification of HF-Treated Silicon (100) Surfaces by Scanning Tunneling Microscopy in Air Under Imaging Conditions", Appl. Phys. Lett., vol. 61, No. 4, Jul. 27, 1992, 1992 American Institute of Physics, pp. 462-464.
J.A. Dagata et al., entitled "Modification of Hydrogen-Passivated Silicon by A Scanning Tunneling Microsocpe Operating in Air", Appl. Phys. Lett., vol. 56, No. 20, May 24, 1990, pp. 2001-2003.
J.A. Dagata et al., entitled "Pattern Generation on Semiconductor Surfaces by A Scanning Tunneling Microscope Operating in Air", J. Vac. Sci. Technol. B, vol. 9, No. 2, Mar./Apr. 1991, pp. 1384-1388.
Sugimura, et al. entitled "Maskless Patterning of Silicon Surface Based on Scanning Tunneling Microscope Tip-Induced Anodization and Chemical Etching", Appl. Phys. Lett., vol. 65, No. 12, Sep. 19, 1994, pp. 1569-1571.
Wang et al., entitled "Nanometer-Structure Writing on SI(100) Surfaces Using A Non-Contact-Mode Atomic Force Microscope", Appl. Phys. Lett., vol. 65, No. 11, Sep. 12, 1994, pp. 1415-1417.
Wolf et al., entitled "Silicon Processing For The VLSI Era Volume 1: Proess Technology", Lattice Press, 1986, pp. 209-210.
H.J. Mamin et al., entitled "Thermomechanical writing with an atomic force microscope tip", Appl. Phys. Lett. 61(8), Aug. 24, 1992, pp. 1003-1005.
T.A. Jung et al., entitled "The atomic force microscope used as a powerful tool for machining surfaces", Elsevier Science Publishers, 1992, pp. 1446-1451.
H.J. Song et al., entitled "25 nm chromium oxide lines by scanning tunneling lithography in air", 38th Int'l. Symp. on Electron, Ion and Photon Beams, New Orleans, LA, May 31-Jun. 3, 1994, pp. 16 pages.
A. Majumdar et al., entitled "Nanometer-scale lithography using the atomic force microscope", Appl. Phys. Lett. 61(19), Nov. 9, 1992, pp. 2293-2295.
H. Sugimuar et al., entitled "Tip-induced anodization of titanium surfaces by scanning tunneling microsopy: A humidity effect on nanolithography", Appl Phys. Lett. 62(9), Aug. 30, 1993. pp. 1288-1290.
L. Tsau et al., entitled "Nanometer scale patterning of silicon (100) surfaces by an atomic force microscope operating in air", Appl Phys. Lett. 64(16), Apr. 18, 1994, pp. 2133-2135.
E. S. Snow et al., entitled "Fabrication of Si nanostructures with an atomic force microscope", Appl. Phys. Lett. 64(15), Aug. 11, 1994, pp. 1932-1934.
J.M. Calvert entitled "Lithographic patterning of self-assembled films", J. Vac. Sci. Technol. B 11(6), Nov./Dec. 1993, pp. 2155-2163.
R.C. Tiberino et al., entitled "Self-assembled monolayer electron beam resist on GaAs", Appl. Phys. Lett. 62(5), Feb. 1, 1993, pp. 476-478.
C.R.K. Marrian et al., entitled "Low voltage electron beam lithography in self-assembled ultrathin films with the scanning tunneling microscope", Appl Phys. Lett. 64(3), Jan. 1, 1994, pp. 390-392.
C.B. Ross et al. entitled "Scanning Probe Lithography 1. Scanning Tunneling Microscope Induced Lithography of Self-Assembled n-Alkanethiol Resists", American Chemical Society, Langmuir, vol. 9, No. 3, 1993, pp. 632-636.
Y. Ejiri et al., entitled "Modification of Silicon Surface Produced by Electric Field Enhanced Oxidation Through Native Oxide", Extended Abstracts of 1993 Int'l. Conf. on Solid State Devices and Materials, 1993, pp. 606-608.
E.S. Snow et al., entitled "Fabrication of silicon nanostructures with a scanning tunneling microscope", Appl. Phys. Lett. 63(6), Aug. 9, 1993,pp. 749-751.
Y. Utsugi, entitled "Nanometre-scale chemical modification using a scanning tunnelling microscope", Nippon Telegraph and Telephone Corp. LSI Laboratories, undated, 2 pgs.
M. Tortonese et al., entitled "Atomic Force Microscopy Using a Piezoresistive Cantilever", IEEE, Mar. 1991, pp. 448-450.
E.S. Snow et al., entitled "Fabrication of Si nanostructures with an atomic force microscope", Appl. Phys. Lett. 64(15), Apr. 11, 1994, 12 pages.
P. I. Oden et al., entitled "Applications of Atomic Force Microscopy for Nanolithography", undated 7 pgs.
Technology of proximal probe lithography, "Principles and Techniques of STM Lithography", M.A. McCord et al, 1993, The Society of Photo-Optical Instrumentation Engineers, pp. 16-32.
Technology of proximal probe lithography, "Low Voltage E-Beam Lithography With The STM", C.R.K. Marrian et al, 1993, The Society of Photo-Optical Instrumentation Engineers, pp. 58-73.
Technology of proximal probe lithography, "The Technology of Proximal Probe Lithography: An Overview", J.A. Dagata et al, 1993, The Society of Photo-Optical Instrumentation Engineering, pp. 3-11.
Kramer et al, entitled "Nanometer Lithography on Silicon and Hydrogenated Amouphous Silicon ith Low Energy Electrons", abstract, International Conference. Sep. 1994.
N.

Affiliated with

Also associated with

Rating

Vibrating probe for a scanning probe microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vibrating probe for a scanning probe microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vibrating probe for a scanning probe microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2073507