Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1995-12-12
1997-05-20
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
056314108
ABSTRACT:
An atomic force microscope capable of vibrating a cantilever at a constant amplitude at all times. Variations in the vibration of the cantilever are sensed by detecting the variation in the position of reflected light by a photodetector. The output signal from the photodetector is fed to a band-pass filter to extract those frequency components which are close to the resonance frequency of the cantilever. The output from the filter is fed to a waveform converter to convert the signal into a square-wave signal of a constant amplitude via a phase-adjusting circuit. The output from this waveform converter is supplied as a driving signal to a piezoelectric device via an amplitude-adjusting circuit and also to a frequency-to-voltage converter to convert the signal into a voltage signal V.sub.fv corresponding to the frequency. A reference voltage comparator produces the difference between the voltage signal V.sub.fv and a reference signal. This difference signal is supplied as a feedback signal to a z-scanner drive circuit.
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AFM Imaging Modes, TopoMetrix Corporation, 1993, pp. 1-16.
Martin et al., "Atomic Force Microscope-Force Mapping and Profiling on a Sub 100-.ANG. Scale", J. Appl. Phys., vol. 61, No. 10, 15 May 1987, pp. 4723-4729.
Jeol Ltd.
Larkin Daniel S.
Williams Hezron E.
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