Vibrating microgyrometer

Details Vibrating microgyrometer Vibrating microgyrometer

1998-10-30

2000-07-18

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01P 904

Patent

active

060890886

ABSTRACT:
The invention relates to a vibrating microgyrometer incorporating a seismic mass (16) placed above a surface of a substrate (15) and attached to the surface by elastic supports arranged so as to enable the seismic mass (16) to move with respect to the substrate (15) in two directions x, y orthogonal to one another and orthogonal to the measurement axis of the microgyrometer. The microgyrometer also comprises excitation electrodes (40) making it possible to excite the seismic mass in the two mutually orthogonal directions and detection electrodes (41) making it possible to detect components of the Coriolis force, once again in the two mutually orthogonal directions.

REFERENCES:
patent: 3992952 (1976-11-01), Hutton et al.
patent: 5610334 (1997-03-01), Fima et al.

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