Vibrating force sensor

Details Vibrating force sensor Vibrating force sensor

1989-03-09

1990-08-14

Ruehl, Charles A.

Measuring and testing

Dynamometers

Responsive to force

177210FP, G01L 110

Patent

active

049476947

ABSTRACT:
A vibrating force sensor comprising a metallic strip having three metallic coplanar beams (20, 21, 22). The sensor also includes capacitive transducers (30, 31) for driving the beam or beams into flexural vibration in a plane normal to their common plane and for detecting changes in the frequency of vibrations in response to changes in tension applied to the sensor. Drive and detect electrodes (50, 51) are formed on the surface of an intermediate insulating layer (70) in turn located on the surface of a shielding layer (71) of conductive material.

REFERENCES:
patent: 3505866 (1970-04-01), Weisbord et al.
patent: 3657667 (1972-04-01), Nishikubo et al.
patent: 4299122 (1981-11-01), Ueda et al.
patent: 4594898 (1986-06-01), Kirman et al.
patent: 4764244 (1988-08-01), Chitty et al.
"Force transducer using a double-ended tuning fork mechanical resonator with optical fibre links", M. J. Halliwell & B. E. Jones, Sep. 1987.

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