Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1981-03-04
1983-05-03
Gill, James J.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
310 25, 310309, G01C 1956
Patent
active
043816720
ABSTRACT:
A rotation sensor having a vibrating cantilever beam is disclosed herein. The sensor comprises an integral single crystal silicon cantilever beam and support structure, an oscillator circuit for generating an electrical signal vibrating the cantilever beam at or near its natural resonant frequency and a piezoresistive element formed at the base of the base of the vibrating beam. The piezoresistive element is only sensitive to the stresses induced in the beam due to the rotation of the beam about an axis parallel to its length.
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patent: 2974530 (1961-03-01), Jaouen
patent: 3127775 (1964-04-01), Hansen et al.
patent: 3141100 (1964-07-01), Hart
patent: 3201998 (1965-08-01), Horn
patent: 3614677 (1971-10-01), Wilfinger
patent: 3992952 (1976-11-01), Hutton et al.
patent: 4264838 (1981-04-01), Jacobson
patent: 4266156 (1981-05-01), Kizaki
"High-Q Selective Filters Using Mechanical Resonance of Silicon Beams" by Hribsek From IEEE Transactions on Circuits & Systems, vol. CAS 25, No. 4, Apr. 1978.
"Silicon Diffused Element Piezoresistive Diaphragms" by Tufte From Journal of Applied Physics, vol. 33, No. 11, Nov. 1962.
"Tracking Phase Locked Oscillator" by Kotzin From Motorola Technical Disclosure Bulletin, vol. 1, No. 1 , Aug. 1980.
"Piezoelectric Vibrating Beam Rate Gyro" by Watson From Navy Technical Disclosure Bulletin, vol. 4, No. 6, Jun. 1979.
"Microprocessors Get Integrated Sensors" by Middelhock From IEEE Spectrum, Feb. 1980.
"Ein Piezoresistiver Halbleiter" by Bretschi From Feinwerktechnik & Messtechnik, vol. 83, No. 7, Nov. 1975.
O'Connor James M.
Shupe David M.
Gill James J.
Ignatowski James R.
The Bendix Corporation
Wells Russel C.
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