Vibrating beam accelerometer

Details Vibrating beam accelerometer Vibrating beam accelerometer

1993-04-30

1994-08-02

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310329, 73517AV, G01P 1510, H01L 4108

Patent

active

053349016

ABSTRACT:
A vibrating beam accelerometer contains an inner structure having a vibrating beam extending between a pair of isolator masses which are connected via isolator beams to a pair of structures, an outer structure having flexure beams extending between a mount structure and a proof mass structure and a peripheral seal structure surrounding said inner structure and said outer structure. Seal plates containing a ring of glass frit material sandwich the above assembly. An electrode pattern termination extends from the above assembly, through the ring of glass frit material, to electronic circuitry containing an oscillator.

REFERENCES:
patent: 4333342 (1982-06-01), Gilden et al.
patent: 4656383 (1987-04-01), Albert
patent: 4804875 (1989-02-01), Albert
patent: 4879914 (1989-11-01), Norling
patent: 4939935 (1990-07-01), Amand
patent: 4980598 (1990-12-01), Albert
patent: 5092172 (1992-03-01), Overman
patent: 5176031 (1993-01-01), Peters

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