Via/line inductor on semiconductor material

Details Via/line inductor on semiconductor material Via/line inductor on semiconductor material

2006-07-18

2006-07-18

Nguyen, Tuyen T (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

C257S531000

Reexamination Certificate

active

07078998

ABSTRACT:
A spiral inductor is provided including a substrate and an inductor dielectric layer over the substrate having a spiral opening provided therein. The spiral inductor is in the spiral opening with the spiral inductor including a plurality of parallel spiral vias connected together at center proximate and center distal ends of the spiral inductor.

REFERENCES:
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patent: 5559360 (1996-09-01), Chiu et al.
patent: 6081033 (2000-06-01), Clampitt
patent: 6395637 (2002-05-01), Park et al.
patent: 6617665 (2003-09-01), Farcy et al.
patent: 6717503 (2004-04-01), Berthold et al.
patent: 6791158 (2004-09-01), Lemaire
patent: WO 98/43258 (1998-10-01), None

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