Electricity: conductors and insulators – Conduits – cables or conductors – Single duct conduits
Patent
1985-04-30
1988-12-06
Nimmo, Morris H.
Electricity: conductors and insulators
Conduits, cables or conductors
Single duct conduits
361414, 427 97, H05K 100
Patent
active
047897600
ABSTRACT:
An improved integrated circuit structure is disclosed wherein a first metal layer is coated with a dielectric material and another metal layer is applied over the dielectric layer and a via electrically interconnects at least a portion of the first metal layer with at least a portion of the second metal layer. The via is formed having a lower first width dimension adjacent the first metal layer and an upper enlarged width portion adjacent the second metal layer formed by masking the dielectric with a mask having an opening conforming to the first dimension and isotropically etching the dielectric through the mask to provide the enlarged portion adjacent the upper surface of the dielectric.
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Koyama Linda J.
Levinson Harry J.
Thomas Mammen
Advanced Micro Devices , Inc.
Nimmo Morris H.
Taylor John P.
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