Via array monitor and method of monitoring induced...

Details Via array monitor and method of monitoring induced... Via array monitor and method of monitoring induced...

2005-09-06

2005-09-06

Graybill, David E. (Department: 2822)

Semiconductor device manufacturing: process

With measuring or testing

C438S017000, C438S622000, C438S926000

Reexamination Certificate

active

06939726

ABSTRACT:
An electrical monitor comprising a via array and method for determining and reducing an electrically charged state of a semiconductor process wafer the method including providing a metal filled via array including a plurality of interspersed electrically isolated dummy metal portions to form a via array monitor; exposing the semiconductor process wafer including the via array monitor to an electrical charge altering process including to produce an electrically charged state over at least a portion of the semiconductor wafer; carrying out electrical measurements of the via array monitor to determine a level of the electrically charged state; and, carrying out an electrically charge neutralizing process to reduce a level of the electrically charged state to a predetermined acceptable level prior to carrying out a subsequent process.

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