Vessel of pyrolytic boron nitride

Details Vessel of pyrolytic boron nitride Vessel of pyrolytic boron nitride

1996-08-16

1998-06-02

Nold, Charles

Stock material or miscellaneous articles

Hollow or container type article

Glass, ceramic, or sintered, fused, fired, or calcined metal...

428 346, 422102, 422248, 422 99, B01L 304

Patent

active

057596468

ABSTRACT:
Proposed is an improvement in a vessel, e.g., crucible, of pyrolytic boron nitride (PBN) used, for example, in the process of molecular beam epitaxy for melting silicon and the like at a high temperature. Different from conventional PBN crucibles used for such a process, in which contamination of high-purity silicon is unavoidable by the reaction of molten silicon with PBN or a thermal decomposition products of boron nitride, the inventive PBN vessel is provided on the surface with a protective coating layer of pyrolytic graphite or a refractory metal such as platinum so as not to cause troubles due to contamination of high-purity silicon melted therein with the crucible materials.

REFERENCES:
patent: 5158750 (1992-10-01), Finicle
Derwent Publications--AN 94-196945 & JP 06 135 793 Abstract.
Derwent Publications--AN 94-196946 & JP 06 135 794 Abstract.
Patent Abstracts of Japan, vol. 015, No. 213, May 30, 1991 and JP 03 060114, Mar. 15, 1961.

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