Vessel and system for treating wafers with fluids

Details Vessel and system for treating wafers with fluids Vessel and system for treating wafers with fluids

1987-11-25

1989-08-15

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

134102, B08B 304

Patent

active

048565440

ABSTRACT:
Disclosed is apparatus for treating semiconductor wafers with fluids. The device comprises one or more vessels having lateral walls defining open ends. The vessels are arranged serially, and the open ends are engaged with a treatment fluid inlet and a treatment fluid outlet. Wafers or a wafer carrier are introduced into the vessels for treatment. The vessels are constructed of material that is inert to the treatment fluids and designed to minimize creation of eddy currents and fluid traps. Hydraulically full fluid flow through the vessel uniformly contacts the wafers with the fluid and results in improved and more reproducible prediffusion cleaning, rinsing, etc.

REFERENCES:
patent: 1040463 (1982-10-01), Tokheim
patent: 2706992 (1955-04-01), Friedman et al.
patent: 2959151 (1960-11-01), Ehrlich
patent: 2961354 (1960-11-01), Cleveland
patent: 3276458 (1966-10-01), Iversen et al.
patent: 3285458 (1966-11-01), Wojciechowski
patent: 3343812 (1967-09-01), Moulton
patent: 3392780 (1968-07-01), Brown
patent: 3443991 (1969-05-01), Kremm
patent: 3469686 (1969-09-01), Gutsche et al.
patent: 3487948 (1970-01-01), Haidegger
patent: 3534862 (1970-10-01), Shambelan
patent: 3595252 (1971-07-01), Conte
patent: 3632462 (1972-01-01), Barrington
patent: 3746022 (1973-07-01), Fillion et al.
patent: 3760822 (1973-09-01), Evans
patent: 3826377 (1974-07-01), Bachmann
patent: 3834349 (1974-09-01), Dietze et al.
patent: 3870033 (1975-03-01), Faylor et al.
patent: 3877134 (1975-04-01), Shanahan
patent: 3923156 (1975-12-01), Wallestad
patent: 3926305 (1975-12-01), Wallestad
patent: 3998333 (1976-12-01), Kamada
patent: 4015615 (1977-04-01), Weber et al.
patent: 4039357 (1977-08-01), Bachmann et al.
patent: 4077416 (1978-03-01), Johnson, Jr. et al.
patent: 4111715 (1978-09-01), Sprengling et al.
patent: 4132567 (1979-01-01), Blackwood
patent: 4153164 (1979-05-01), Hofmeister et al.
patent: 4197000 (1980-04-01), Blackwood
patent: 4228902 (1980-10-01), Schulte
patent: 4235650 (1980-11-01), Chang et al.
patent: 4246101 (1981-01-01), Selby, III
patent: 4252229 (1981-03-01), Lee
patent: 4280912 (1981-07-01), Berry, III et al.
patent: 4282825 (1981-08-01), Nagatomo et al.
patent: 4286541 (1981-09-01), Blackwood
patent: 4318749 (1982-03-01), Mayer
patent: 4321654 (1982-03-01), Nakajo et al.
patent: 4328081 (1982-05-01), Fazlin
patent: 4358470 (1982-11-01), Rasmussen
patent: 4383884 (1983-05-01), Rozmus
patent: 4395348 (1983-07-01), Lee
patent: 4479849 (1984-10-01), Frantzen
Book of Semi Standards, "Semi Specification-3", 100 mm, and 125 mm Plastic and Metal Wafer Carriers, pp. 1-9, vol. 2, Equipment Division, Semiconductor Equipment and Materials Institute, Inc., Semi 1983.
Chemineer Kenics Brochure, "Kenics Static Mixers," pp. 1-11, Chemineer, Inc.
Koch Engineering Company, Inc. Brochure, "Efficient, Maintenance-Free, In-Line Motionless Mixers," and "Our High-Capacity, Low-Pressure-Drop Dumped Packings."
Komax Systems, Inc. Brochure, "Simultaneous Division, Cross-Current and Back-Mixing."

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