Very thin film capacitor for dynamic random access memory (DRAM)

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor

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3613014, 257306, H01G 4002, H01G 433

Patent

active

061281786

ABSTRACT:
A capacitor and a dynamic random access memory (DRAM) incorporating such a capacitor, includes a first layer of conducting, doped perovskite material, a second layer of another conducting, doped perovskite of opposite polarity in contact with the first layer, and a depletion layer formed at an interface between the first and second layers of conducting perovskite materials, the depletion layer being an insulating layer of the capacitor. Another capacitor and DRAM incorporating such a capacitor, includes a first electrode, a second electrode opposing the first electrode, and a thin-film of high dielectric constant perovskite material sandwiched between the first and second electrodes. At least one of the first and second electrodes is formed from substantially the same perovskite material, as the thin-film, in conducting, doped form.

REFERENCES:
patent: 5155658 (1992-10-01), Inam et al.
patent: 5479317 (1995-12-01), Ramesh
patent: 5519235 (1996-05-01), Ramesh
patent: 5760432 (1998-06-01), Abe et al.
patent: 5986301 (1999-11-01), Fukushima et al.

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