Very smooth and flat polycrystalline alumina substrates from dir

Details Very smooth and flat polycrystalline alumina substrates from dir Very smooth and flat polycrystalline alumina substrates from dir

1985-10-15

1987-07-07

Dixon, Jr., William R.

Compositions: ceramic

Ceramic compositions

Refractory

501119, 501153, C04B 3510

Patent

active

046787623

ABSTRACT:
This invention provides thin, flat, water-impervious polycrystalline ceramic bodies composed of at least 99.5% by weight alumina, predominantly in the alpha crystal form. These bodies have a density of at least 3.9 Mg/m.sup.3, an average surface roughness of 44 nm or less, typically 40 nm or less. The properties of the finished ceramic bodies make them ideal substrates for highly reliable electronic components, especially for high temperature environments. Processes for obtaining such bodies by direct firing of slip cast tapes are also described.

REFERENCES:
patent: 2966719 (1961-01-01), Park, Jr.
patent: 3698923 (1972-10-01), Stetson et al.
patent: 3740243 (1973-06-01), Kappes et al.
patent: 4045412 (1977-08-01), Yamada et al.
patent: 4217337 (1980-08-01), Yamada et al.
Snook, "As-Fired vs Lapped-and-Polished Substrates for Thick- and Thin-Film Hybrid Circuits", Proc. IEEE, vol. 59, (Aug. 1971), pp. 1202-1213.
Snook, "As Fired vs Lapped-and-Polished Substrates for Thick and Thin Film Hybrid Circuits", Microelectronic Manufacturing and Testing, Oct. 1983.
Wheildon, Modern Materials: Advances in Development and Applications, vol. 2, pp. 111-115, Academic Press, 1960.
Parish et al, "Narrow Size Distribution Powders from Commercial Ceramic Powders", Ceramic International, 75, 10, 1984.

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