Coherent light generators – Particular resonant cavity – Specified cavity component
Patent
1997-07-01
1999-10-19
Sanghavi, Hemang
Coherent light generators
Particular resonant cavity
Specified cavity component
372 99, 372100, 372 95, 372 20, 372 57, H01S 308
Patent
active
059700823
ABSTRACT:
A very narrow band laser. The very narrow bandwidth is achieved by creating an unstable resonance cavity using a cylindrical, partially-reflecting mirror to provide an output coupler in combination with a line narrowing module having a beam expander and a curved grating.
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Cymer Inc.
Ross, Esq. John R.
Sanghavi Hemang
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