Coherent light generators – Particular active media – Gas
Patent
1997-06-04
1999-01-05
Scott, Jr., Leon
Coherent light generators
Particular active media
Gas
372102, 372 19, 372 20, H01S 322
Patent
active
058569910
ABSTRACT:
A very narrow band excimer laser. The very narrow bandwidth is achieved by using an etalon as an output coupler in combination with a line narrowing element located at the rear of the laser. Preferred embodiments are capable of producing 10 mJ laser pulses at 1000 Hz with a 95% integral bandwidth of less than 1.5 pm.
REFERENCES:
patent: 4803696 (1989-02-01), Pepper et al.
patent: 5012483 (1991-04-01), Reintjes et al.
patent: 5043998 (1991-08-01), Cooper et al.
patent: 5095492 (1992-03-01), Sandstrom
patent: 5150370 (1992-09-01), Furuya et al.
patent: 5327449 (1994-07-01), Du et al.
patent: 5559816 (1996-09-01), Basting et al.
Cymer Inc.
Jr. Leon Scott
Ross, Esq. John R.
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