Very narrow band KrF laser

Details Very narrow band KrF laser Very narrow band KrF laser

1997-04-23

1998-11-10

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 20, 372 99, 372100, H01S 322

Patent

active

058355200

ABSTRACT:
A very narrow band KrF excimer laser capable of producing 10 mJ laser pulses at 1000 Hz with a bandwidth of less than 0.6 nm (FWHM). The very narrow bandwidth is achieved by reducing fluorine partial pressure to less than 0.08 and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line narrowing module were replaced with calcium fluoride prisms.

REFERENCES:
patent: 5559816 (1996-09-01), Basting et al.

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