Photocopying – Projection printing and copying cameras – Image transferred to or from curved surface
Patent
1997-08-20
2000-01-25
Metjahic, Safet
Photocopying
Projection printing and copying cameras
Image transferred to or from curved surface
355 53, 355 67, G03B 2748, G03B 2742, G03B 2754
Patent
active
060183837
ABSTRACT:
In the manufacturing of flexible, large-area electronic modules such as flat-panel displays (FPDs), the high cost and low yields of currently available patterning equipment represent a significant barrier to cost-effective production. This invention provides a projection imaging system that can pattern very large, flexible substrates at very high exposure speeds with almost any desired image resolution. The master pattern to be imprinted on the substrate is contained on a mask which, similar to the substrate, is made of a flexible material The mask and substrate are scanned by rollers through the object and the image field, respectively, of a 1:1 projection lens. All of the rollers are driven by identical drive systems linked to a common motor; therefore, the scanning of the mask and substrate is perfectly synchronized. Both the mask and the substrate, along with their rollers, are mounted on a linear translation stage. The translation stage scans continuously at a velocity which is chosen such that, for every complete rotation of the mask and substrate, the linear stage will move by the effective scan width. The entire substrate is patterned using one continuous helical scan. Suitable overlap between complementary intensity profiles produced by a hexagonal illumination configuration ensures seamless joining of the scans. The use of rollers significantly enhances the throughput and effectively reduces the payload and footprint of the scanning stage leading to substantial system cost savings.
REFERENCES:
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Dunn Thomas J.
Farmiga Nestor O.
Jain Kanti
Weisbecker Carl
Zemel Marc
Anvik Corporation
Kim Peter B.
Kling Carl C.
Metjahic Safet
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