Very high speed integrated microelectronic tubes

Details Very high speed integrated microelectronic tubes Very high speed integrated microelectronic tubes

1987-02-11

1988-01-26

DeMeo, Palmer C.

Electric lamp and discharge devices

With gas or vapor

Having a particular total or partial pressure

313574, 313584, 313606, 313620, 313309, 313336, 313351, H01J 130, H01J 706, H01J 1748

Patent

active

047218851

ABSTRACT:
An array of microelectronic tubes is shown which includes a plate-like substrate upon which an array of sharp needle-like cathode electrodes is located. Each tube in the array includes an anode electrode spaced from the cathode electrode. The tubes each contain gas at a pressure of between about 1/100 and 1 atmosphere, and the spacing between the tip of the cathode electrodes and anode electrodes is equal to or less than about 0.5 .mu.m. The tubes are operated at voltages such that the mean free path of electrons travelling in the gas between the cathode and anode electrodes is equal to or greater than the spacing between the tip of the cathode electrode and the associated anode electrode. Both diode and triode arrays are shown.

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T. R. Shoulders, "Microelectronics Using Electron-Beam-Activated Machining Techniques", Advances in Computers, 2, pp. 135-197. Academic Press, New York, London, 1961.

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