Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1996-07-22
1997-02-04
Chilcot, Richard
Measuring and testing
Fluid pressure gauge
Diaphragm
G01L 906
Patent
active
056000715
ABSTRACT:
A vertically integrated sensor structure (60) includes a base substrate (71) and a cap substrate (72) bonded to the base substrate (71). The base substrate (71) includes a transducer (78) for sensing an environmental condition. The cap substrate (72) includes electronic devices (92) formed on one surface to process output signals from the transducer (78). The sensor structure (60) provides an integrated structure that isolates sensitive components from harsh environments.
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Chan Wendy K.
Goldman Kenneth G.
Monk David J.
Sooriakumar K.
Chilcot Richard
Jackson Kevin B.
Motorola Inc.
Oen William L.
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