Vertical wafer carrying apparatus

Details Vertical wafer carrying apparatus Vertical wafer carrying apparatus

1990-09-20

1992-05-19

Valenza, Joseph E.

Conveyors: power-driven

Conveyor system having auxiliary section for storing items...

Auxiliary section has the same entrance and exit

1983471, 198607, B65G 112

Patent

active

051139928

ABSTRACT:
An apparatus for vertically carrying semiconductor wafers includes a pair of flexible endless belts, each having projections for forming horizontal, parallel shelves. The endless belts are supported by a support unit and are movable along endless loops. The endless belts are disposed with their shelves facing each other to define a vertical transfer path having an entrance and an exit. A drive unit drives the endless belts along the endless loops at equal speeds in the same direction within the vertical transfer path. The wafer carrying apparatus also comprises an entrance conveying unit disposed close to the entrance of the vertical transfer path for conveying a semiconductor wafer to the entrance and an exit conveying unit disposed close to the exit of the vertical transfer path for conveying a semiconductor wafer from the exit. The entrance and exit of the apparatus can be altered as desired by changing the operational modes of the endless belts and the conveying units.

REFERENCES:
patent: 3105334 (1963-10-01), Marshall
patent: 3124231 (1964-03-01), Ott, Jr.
patent: 3754632 (1973-08-01), Kreutter
patent: 4116117 (1978-09-01), Bogaard
patent: 4170285 (1979-10-01), Hinchcliffe
patent: 4220236 (1980-09-01), Blidung et al.
patent: 4502587 (1985-03-01), Clark
IBM Technical Disclosure Bulletin, "Wafer Buffer", Hanscom, Leverett, & Lockhart, Apr. 1976, vol. 18 No. 11.

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