Vertical type heat treatment system

Details Vertical type heat treatment system Vertical type heat treatment system

1994-01-21

1995-09-05

Kastler, Scott

Metallurgical apparatus

Means treating solid metal

By contact with gas

432 5, 432239, H01L 2100

Patent

active

054472946

ABSTRACT:
A vertical heat treatment system for heat treating a large number of semiconductor wafers housed in a boat at once includes a heat treatment unit having a boat loading/unloading port, a boat section communicating with the heat treatment unit through the boat loading/unloading port, an elevator mechanism for loading/unloading the boat between the boat section and the heat treatment unit through the boat loading/unloading port, a cassette section provided adjacent to the boat section, a wafer transfer mechanism for transferring wafers between a cassette and the boat, a gas supply mechanism for supplying a non-oxidization gas into the boat section, and a gas shower means for blowing the non-oxidization gas to the wafers in the vicinity of the boat loading/unloading port.

REFERENCES:
patent: 5236181 (1993-08-01), Ishii et al.
patent: 5271732 (1993-12-01), Yokokawa
patent: 5277579 (1994-01-01), Takanabe
patent: 5360336 (1994-11-01), Monoe

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