Vertical transfer system for a vacuum chamber and gate valve ass

Valves and valve actuation – Reciprocating valve – Gate

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Details

25112915, 2511292, 251 65, 310 12, F16K 3108

Patent

active

058201041

ABSTRACT:
A vacuum-oriented vertical transfer system which provides super vacuum/super clean environments, and a gate valve assembly which reduces the size of electromagnet sections. The vacuum-oriented vertical transfer system includes a cylindrical partition wall, and a rod vertically moved through an open bottom of a vacuum container. The rod is floatingly supported in radial and axial directions thereof by a radial magnetic support device and an axial magnetic support device, respectively. The gate valve assembly comprises a closure member mounted for positioning adjacent to and away from a port of a container to close and open the port, respectively. A neck member is integrally connected to the closure member and is mounted for movement to position the closure member to open and close the port of the container. A radial magnet device levitates the neck member by magnetic forces in a radial direction thereof. An axial magnetic device levitates the neck member by magnetic forces in an axial direction thereof. A moving mechanism moves the neck member to position the closure member to open and close the port of the container.

REFERENCES:
patent: 4650132 (1987-03-01), Graf et al.
patent: 4747577 (1988-05-01), Dimock
patent: 5039061 (1991-08-01), Heard et al.
patent: 5069422 (1991-12-01), Kawamura
patent: 5309049 (1994-05-01), Kawada et al.
patent: 5350275 (1994-09-01), Ishimaru
patent: 5590515 (1997-01-01), Boden

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