Vertical-to-surface transmission electro-photonic device with io

Details Vertical-to-surface transmission electro-photonic device with io Vertical-to-surface transmission electro-photonic device with io

1994-02-01

1996-03-19

Bovernick, Rodney B.

Coherent light generators

Particular active media

Semiconductor

372 96, H01S 318

Patent

active

055008682

ABSTRACT:
The invention provides a vertical-to-surface transmission electro-photonic semiconductor device with a mesa structure of light reflective multiple layers in which the device includes a high resistive region for a carrier confinement. The high resistive region is formed by an ion-implantation of proton in a downward oblique direction during a rotation of a semiconductor substrate with use of a photo-resist mask whose horizontal width is larger than that of the mesa structure. The high resistive region defines a light emitting area of an active layer, an inverse circular truncated cone like definition of a top cladding region and a circular truncated cone like definition of a bottom cladding region. The oblique angle ion-implantation permits the top cladding region to be free from any exposure of the ion-implantation thereby an electrical resistance of the device is reduced.

REFERENCES:
patent: 5274655 (1993-12-01), Shieh et al.
By K. Kurihara et al., "High Electronic-Optical Conversion Efficiency in a Vertical Surface Transmission Electro-Photonic Device with a Vertical Cavity", The Japanese Society of Applied Physics, 1992, pp. 598-600. (No month available).
By H. Yoo et al., "Fabrication of Vertical-Cavity Front-Surface-Emitting Laser Diode (FSELD) Using a Heterojunction Bipolar Transistor Process", Japanese Journal of Applied Physics, Mar. 1991, vol. 30, No. 3B, pp. 492-494.
By K. Kurihara et al., "Double-Mesa-Structure Vertical-to-Surface Transmission Electro-Photonic Device with a Vertical Cavity", Japanese Journal of Applied Physics, 1993, vol. 32, No. 1B, pp. 604-608. (Jan.).

Affiliated with

Also associated with

Rating

Vertical-to-surface transmission electro-photonic device with io does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vertical-to-surface transmission electro-photonic device with io, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vertical-to-surface transmission electro-photonic device with io will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1963518